Brooks Automation, Inc.
Has been a leading automation provider and trusted partner to the global manufacturing industry. We deliver value through our understanding of the application challenge, providing solutions at scale that create an automated advantage for our customers.
- +1-978-262-2400
- 15 Elizabeth Drive
Chelmsford, MA 01824
United States
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product
Components
The Brooks field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency, accelerate innovation, and drive profits for today’s manufacturers.
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product
Reticle Handling
A reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
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product
Sorters
Spartan™
The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
