Fully Automatic 4 Point Probe Sheet Resistance System For Semiconductor Process Evaluate

WS-3000 - NAPSON Corp.

*Automatic probe head selection(exchanger) among 4 kinds of probe head
*[No need to exchange a probe head by each different sample measurement]
*Edge 1mm measurement is available by dual meas. mode
*High cost performance from high speed measurement
*FOUP compatible, GEM / SECS compatible