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XY Stage 10nm Resolution
U-723 PILineĀ® - Physik Instrumente GmbH & Co. KG (PI)
Compact XY Stage with Ultrasonic Piezomotors. Fast positioning in 2 axes. Space-saving and light. Excellent guiding accuracy. High sensor resolution of 10 nm. Self-locking, no heat generation at rest. Low-noise operation.