Dual-Arm Robot for Transport Applications of 300mm and 450mm Wafers

GPR-GB8-SM - Genmark Automation (Genmark Automation)

The combination of global linear motion of the two-links arm (R-axis) and rotation (Y-axis) of two swapping arms (A1 and A2 axes) ensure optimal handling of up to 4 in-line FOUPs, and dimensionally equivalent process modules, without the need to mount the robot on linear track component.