Electrodeless Z-Pinch™10 Watt EUV Source

EQ-10 - Energetiq Technology, Inc.

The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.