Wet Oxidation System For VCSEL Fabrication

VIXEL-320 - California Scientific, Inc. (CSI)

s a wet oxidation system intended for the fabrication of Vertical Cavity Surface Emitting Lasers. It is an atmospheric-pressure oxidation system with in-situ monitoring of oxide aperture formation. It accommodates single wafers of up to 150mm (6? in diameter.

Add To List Share Product Home Contact/Sales Company Catalog

Topics

Systems
VCSEL
Vertical Cavity Surface Emitting Lasers
Laser Systems
Lasers
Monitoring
Wafer