13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series - MKS Instruments
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
