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Test Handlers
Boston Semi Equipment test handlers are designed for optimum production performance on your test floor.
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Wafer Prober
Prexa MS
The latest fully automated 300mm wafer prober for memory devices. Featuring high rigidity and exceptional thermal control, the system enables full-wafer contact testing.
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Automated Wafer Handler up to 450mm
GPR-GB7S
The GB7S Robot System employs Genmark’s breakthrough and patented GPR™ Technology to achieve the highest level of performance currently available in an automated wafer handler which is capable of handling up to 450mm diameter wafers. The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads. The unique and patented YAW technology feature of the GPR-GB7S Robot System enables it to access in-line process modules, FOUPS and cassettes from a fixed centralized location, and eliminates the need for radial placement of process and other stations around the robot. The GB7 Robot System can have various arm configurations to accommodate a wide range of SMIF/cassettes front-end layouts.
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Wafer Probing Machine
UF3000EX-e
Wafer Probe Station is used in connection with test system in Wafer Test process.It is a device to move wafer automatically to examine fair quality of individual chip on the wafer. Probe Station is seperated depending on purpose. For analysis, for mass production as well as manual, semi-automatic, full-automatic.
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Test Handler
M6242
Optimal Test Handler for Mass-Production DRAM, with Double the Throughput.
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WAFER MVM-SEM
E3300 Family
The E3310 is a WAFER MVM-SEM* for next generation wafers, supporting 1Xnm node process development and volume production at the 22nm node and beyond. With its high-speed carrier system employing a dual arm vacuum robot, and low-vibration platform to improve measurement accuracy, the E3310 delivers high throughput and performance for wafer measurements. Its multi detector configuration and unique 3D measurement algorithm also enable stable, high-accuracy measurement of 3D transistor technologies such as FinFET. The E3310 makes a significant contribution to reducing process development turnaround time and improves productivity for next-generation devices.
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WDXRF Wafer Analyzer
2830 ZT
The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.
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Octal Test Site Handler
3180
The Chroma 3180 is a productive pick & place system for high-volume multi-site IC testing.
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Wafer Testing
Trio Vertical
SV TCL's TrioTM is a reliable solution for advanced wafer testing challenges, specifically full array and parallel probing. We offer a complete line of vertical probe card products, each designed for your unique application.
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200mm Wafer Sorter
SortMax200™
Achieve exceptional performance with Genmark's SortMax200™ wafer sorter, designed for handling wafers up to 200mm. The SortMax200™ can be configured to accommodate a maximum number of eight open cassette stations.
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Wafer Sorter and Inspection
SolarWIS Platform
Eliminating the opportunity for problematic wafers to enter cell manufacturing lines greatly improves output and yield. ASM AE’s wafer sorter features 3D area inspection capability to inspect wafer thickness, total thickness variation (TTV), saw marks, as well as wafer bow and warpage. SolarWIS also includes modules that can inspect for stain, geometry, micro-cracks, edge chips, resistivity, P or N conductivity and lifetime.
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Wafer & Die Inspection
SemiProbe wafer inspection system (WIS) examines, locates and identifies defects created during wafer manufacturing, probing, bumping, dicing or general handling. This provides microelectronic device manufacturers with accurate, timely quality assurance and process information. The WIS has single sided and double sided wafer mapping capabilities and can improve efficiency, reduce manufacturing costs, increase yields and shorten time to market.
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Turret Test And Scan Handlers
Turret platforms for semiconductor test, inspection and packaging.
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Test Handlers
Multitest Elektronische Systeme GmbH
Multitest has more than 30 years of experience in device handling. Our broad portfolio ensures the most efficient solution for your test application including:*leaded and leadless devices*singulated packages and packages in strips*tri-temp test*MEMS test
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Tri-Temp Pick-and-Place Handler
MT9510 XP / x16
MT9510 XP™/ MT9510 x16™ test handler provides full temperature control during test in extreme environmental conditions from -55˚C to +175˚C. A variety of options, upgrades and retrofits are available to configure the product to customer applications such as; automotive battery management systems (BMS) for electric (EV) and hybrid electric vehicles (HEV) and precision power regulators.
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Wafer Mapping Sensor
M-DW1
Panasonic Industrial Devices Sales Company of America
To provide better safety and improved sensing accuracy, Panasonic studied the requirements for future Wafer Mapping Sensors to ultimately develop the LED Beam Reflective Type Wafer Mapping Sensor, M-DW1. This Sensor uses LEDs as a light source for safe operation and a 2-segment receiving element for higher accuracy in wafer detection.
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Die Test Handler
3112
Chroma 3112 is a productive pick & place handler for high volume single- or multi-site bare die testing.
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Automated Fiber Handler
1200
The 1200 Automated Fiber Handler is the first fiber preparation product that enables optical fiber manufacturers to significantly reduce the cost of production measurements by automating the critical optical fiber stripping, cleaning, cleaving and temporary coupling processes.
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Wafer Flatness Measurement System
FLA-200
*Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)*Measures all materials including Si, GaAs, Ge, InP, SiC*Full 500 micron thickness measurement range without re-*calibration2-D /3-D Mapping software
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Wafer Prober
Precio XL
Fully automated 300mm wafer prober. The system achieves high productivity, excellent contact performance, improved cleanliness, and short lead time, and offers a number of high value-added functions as options.
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High-Throughput Film Frame Handler
MCT FH-1200
FH-1200™ film frame test handler is designed to handle leadless devices mounted on film frame, such as QFN, DFN, WLCSP, BGA, µBGA and eWLB packages. The FH-1200 enables high parallelism testing of post-saw IC devices at ambient temperature. It can accommodate 200 mm and 300 mm wafer rings and custom shapes onto which multiple strips can be mounted. No change kits are required regardless of package size (if same frame is used).
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Wafer Thickness Measurement System
MPT1000
Laser based Wafer Thickness and Roughness Measurement System designed by Chapman Instrument Inc., USA and OEM by Creden Mechatronic Sdn Bhd. A non-contact measurement system measures several parameters in a single system. (wafer & tape thickness, roughness, TTV, bump height, bow and warp measurements)
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Universal Off-Line Handler
OLS Series
Developed as an economical and versatile solution, it adapts to any offline test application - ICT (In Circuit Test), ISP (Flashing) or FCT (functional). The design of this solution allows the quick and ergonomic change of fixtures , with a change time of less than 3 minutes.
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Automated Test Handler
In-Line Duomax
100 % Automated Fixture Change1.5 N x 8000 Test PointsICT FCT EOL IntegrationHigh ProductivityHigh QualityGreat ROINo PLC
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Wafer Thickness Measuring System
WT-425
Contact type can measure any materials within 0.2 µm (2 σ at 20℃ ±1℃). The wafer floats positions while measurement points change and it does not damage even thin wafers. Best for the process control of compound wafers and oxide wafers. (SiC, GaN, LT, Sapphire and Bonded Wafers)
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Logic Test Handler
M620
- Maximized Productivity- Handles various device size- Short conversion time- Easy mantenance- Minimized footprint
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Wafer Auto Line Integration
The line is used for semiconductor wafer grinding. It carries out material matching and distribution, automatic loading and unloading, auto focusing and positioning and many other functions. The grinding precision is 2μm(3-sigma). It is also capable of collecting and analyzing real-time production data and interfacing with MES system.
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Wafer Back Side Cooling System
GR-300 Series
The GR-300 Series can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system.The stability and accuracy of the GR-300 makes it ideal for controlling the flow of Helium and Argon in wafer cooling systems.
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Miniature IC Handler
3270
Chroma 3620 is an innovative system handler for high-volume multi-site IC testing, especially for CIS Testing, at the system level.