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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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Generators
Radio Pulse Signal Generator
The Software Signal generator allows to to produce radio pulse signals of various pulse rate and frequency at the DAC output.
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Generators
Frequency-Modulated Signal Generator
The Software Signal generator allows to produce frequency-modulated signals at the DAC output.
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Generators
Pulse Signal Generator
The Software Signal generator allows to produce pulse signals with various pulse ratio and frequency at the DAC output.
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Generators
Sinusoidal Vibration
Software application Sinusoidal vibration is used for testing products resistance to vibration impact at different frequencies and ranges. It is included into software complex ZETLAB VIBRO, supplied together with VCS ZET017-U. The program is available in VCS menu of ZETLAB control panel.
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Generators
Classical Shock
Software Classical shock is used for testing specimen resistance to shock impact. As the Software Classical shock is activated, at the output of shaker control system ZET 017-U there is formed a signal with pre-set parameters. Types of signals generated:
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Generators
OUR CHALLENGE“To drastically reduce the weight and size of Constant Potential X-Ray generator while maintaining first class performances”To successfully meet this challenge, our engineers have worked at designing an exceptional new X-Ray insert. This highly compact X-Ray tube combined with a revolutionary cooling system and a multiple output carrousel can definitely be considered to be the most versatile X-Ray generator ever developed. In addition, performances are not compromised in any way whatsoever.
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Generators
Linear Frequency-Modulated Signal Generator
The Software Signal generator allows to produce frequency modulated signals with linear sweep at the DAC output.
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Generators
Noise Generator
The noise type to be generated is to be selected from the context menu: right-click the section with the noise name and select the noise type you need.
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Generators
Random Vibration
Random vibration Software program is used for testing the specimen resistance to random vibration impact. This program is a part of vibration controller ZET017-U.
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Generators
Sine Signal Generator
The Software Sine generator allows to produce sine and constant voltage signals at the DAC output.
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Generators
We offer a wide range of power supplies, current and voltage supplies, frequency references, RF generators, transceivers.
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Generators
Signal Generator
Signal Generator is used for forming signals of various shapes, amplitude, and frequency at the output channels of ADC and DAC modules and FFT spectrum analyzers. Functionally, the Signal Generator software replaces stationary generators used in laboratories.
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Generators
Vibration Shock
Software Vibration shock is used for testing specimen resistance to vibration impact. This software is a part of the software complex ZETLAB VIBRO, supplied together with vibration control systems ZET 017-U. The software enables generation of impacts with pre-set parameters and noise presence within a specified frequency range. The software is activated via ZETLAB control panel and VCS menu.
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Generators
GE is bringing generator technology and performance to the next level. We engineer and build our generators to meet the demanding specifications that keep you on the leading edge of efficient, reliable output. Our equipment installs quickly, integrates easily, operates reliably and delivers more power. With over 12,000 generators shipped since 1901, GE understands your challenges, and offers a complete range of configurations and cooling technologies to meet industry needs.
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Generators
Amplitude-Modulated Signal Generator
The Software Signal generator allows to produce amplitude-modulated signals at the DAC output.
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Generators
Generating Signal From a File
The Software Signal generator allows to produce signals from binary and text files at the DAC output.
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Generators
Saw-Tooth Signal Generator
The Software Signal generator allows to produce triangular and saw-tooth (descending, ascending) signals at the DAC output.
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ICP Plasma System
The AXIC IsoLok® Inductively Coupled Plasma (ICP) Load-Locked Processing System from AXIC, Inc. defines a new concept in Deep Reactive Ion Etch (DRIE) and low temperature-low damage Plasma Enhanced Chemical Vapor Deposition (ICP-PECVD) plasma processing. The system is based on a modular design starting with a universal chamber and cabinet unit with ICP etch or deposition bottom electrodes available for easy installation into the chamber unit combined with a load-lock. We are confident you will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma product in the market.
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Microwave Plasma Subsystems
AX2600 And AX2700
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
