EUV (Extreme UltraViolet) Chucks
Electrogrip Company (Electrogrip)
Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
Electrogrip Company (Electrogrip)
Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
