Particle Size Standards
Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of a specific size range and number concentration of solid particles suspended in ultra-pure water (UPW). This suspension is dispersed into clean air or nitrogen and deposited onto wafers and reticles in specific patterns and sizes.
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Process Particles Suspensions
Process Particles™ Suspensions are used as particle material standards. They represent real-world contaminant particles encountered in semiconductor device fabrication processing. Deposition of these particles on wafers and reticles enables characterization of the material-dependent response of a surface inspection system when accurate particle size or particle sphericity are of secondary importance. They consist of broad size distributions of irregularly shaped solid particles suspended in ultra-pure water (UPW). Each bottle contains a suspension volume of 100 mL.
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NanoSilica Size Standards
MSP’s NanoSilica™ Size Standards are concentrated suspensions of amorphous SiO2 particles with highly uniform size distributions, suspended in ultra-pure water (UPW). NanoSilica Size Standards are available in 26 nominal sizes ranging from 15 to 200 nm, with size distributions narrower than commercially available PSL spheres. They’re provided in 5-mL quantities in dropper-tip bottles for convenience when mixing suspensions. All NanoSilica standards come with a Certificate of Calibration and Traceability and a Safety Data Sheet with handling and disposal instructions.
