![Semi-Automated Probe Stations](https://d27wgn5g4t3wja.cloudfront.net/img/89978999-145e-1669-dd8f-616a80b52bd0/239883.png)
Semi-Automated Probe Stations
SPS 2600, SPS 2800, and SPS 12000 Series - MicroXact, Inc.
The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.